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Journal of Vacuum Science and Technology B is the partner journal of ISVSP 2024. Presenters may publish their paper at the special collection for ISVSP 2024. JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology. The scope includes, but is not limited to, the following topics: Compound semiconductor electronics and optoelectronics Devices for energy conversion and storage; Dielectrics in micro- and nanoelectronics Dye-sensitized and other excitonic solar cells Graphene, carbon nanotubes, and fullerenes: materials & devices Group IV semiconductor microelectronics Lithography Microelectromechanical and nanoelectromechanical systems and devices (MEMS & NEMS) Nanometer science and technology Nanostructured materials and devices including 2D-materials, nanowires, nanoparticles, and quantum dots Organic and molecular electronics Photovoltaics based on nanostructured materials Plasmonics Spintronics and magnetic devices Vacuum nanoelectronics, vacuum measurements, and vacuum science and technology Here are some of the papers published under the special collection: Fabrication of plasma-reduced silver coupled with titanium dioxide nanoparticles for visible light-driven photocatalysis (https://doi.org/10.1116/6.0002510) Diagnostics of target-cavity confined plasmas produced by nanosecond pulsed laser ablation of graphite (https://doi.org/10.1116/6.0002500) Color control of titanium nitride thin films (https://doi.org/10.1116/6.0002511) Deposition and morphology of direct current plasma-polymerized aniline (https://doi.org/10.1116/6.0002497) Atmospheric pressure plasma treatment of chitosan-acrylic acid blends (https://doi.org/10.1116/6.0002335) Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst (https://doi.org/10.1116/6.0000304) Stability of TiO2-coated ZnO photocatalytic thin films for photodegradation of methylene blue (https://doi.org/10.1116/6.0000306)